4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Fa-Yuan Chang

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In-situ sequential silicon containing hard mask layer/silicon la

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Process for wafer bonding

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
Reexamination Certificate

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Semiconductor fabrication method suitable for MEMS

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Wafer transfer system with temperature control apparatus

Refrigeration – Using electrical or magnetic effect – Thermoelectric; e.g. – peltier effect
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1740929

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