4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting

Ezra Robert Gold

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Method and apparatus for controlling gas flow to a...

Fluid handling – Line condition change responsive valves – Pilot or servo controlled
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Method and apparatus for controlling gas flow to a...

Coating processes – Coating by vapor – gas – or smoke
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Method and apparatus for gas flow measurement

Measuring and testing – Volume or rate of flow – By measuring electrical or magnetic properties
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Method and apparatus for gas flow measurement

Measuring and testing – Volume or rate of flow – By measuring electrical or magnetic properties
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Method of characterizing a chamber based upon concurrent...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2167475

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