Method and apparatus for gas flow measurement

Details Method and apparatus for gas flow measurement Method and apparatus for gas flow measurement

2011-07-12

2011-07-12

Patel, Harshad (Department: 2855)

Measuring and testing

Volume or rate of flow

By measuring electrical or magnetic properties

C205S157000, C427S248100, C137S487500

Reexamination Certificate

active

07975558

ABSTRACT:
A method and apparatus for measuring gas flow are provided. In one embodiment, a calibration circuit for gas control may be utilized to verify and/or calibrate gas flows utilized for backside cooling, process gas delivery, purge gas delivery, cleaning agent delivery, carrier gases delivery and remediation gas delivery, among others.

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