Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
Inventor
active
Apparatus and method for forming an oxynitride insulating...
Apparatus and method for forming an oxynitride insulating...
Apparatus and method for forming an oxynitride insulating...
High-dielectric constant insulators for FEOL capacitors
High-dielectric constant insulators for FEOL capacitors
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