4. Photocopying
  5. Projection printing and copying cameras
  6. Step and repeat

EUV LLC.

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Figure correction of multilayer coated optics

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method for the protection of extreme ultraviolet lithography...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Reticle stage based linear dosimeter

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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