4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Eugene Tzou

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HDP-CVD deposition of low dielectric constant amorphous...

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Method and apparatus for sputter etch conditioning a ceramic bod

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method and apparatus for sputter etch conditioning a ceramic...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Method of depositing and amorphous fluorocarbon film using...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Undoped and fluorinated amorphous carbon film as pattern...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-1338139

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