4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Eugene Marsh

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Atomic layer deposition methods

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Plural fluid growth steps with intervening diverse operation
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Atomic layer deposition systems and methods including...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Deposition methods with time spaced and time abutting...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Fluid growth from gaseous state combined with preceding...
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Methods of forming devices comprising carbon nanotubes

Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon
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Profile ID: LFUS-PAI-P-2193589

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