Methods of forming devices comprising carbon nanotubes

Details Methods of forming devices comprising carbon nanotubes Methods of forming devices comprising carbon nanotubes

2008-09-22

2011-10-11

Wojciechowicz, Edward (Department: 2895)

Chemistry of inorganic compounds

Carbon or compound thereof

Elemental carbon

C977S712000, C977S721000, C977S745000, C977S748000, C977S764000, C977S765000, C977S781000

Reexamination Certificate

active

08034315

ABSTRACT:
Some embodiments include devices that contain bundles of CNTs. An undulating topography extends over the CNTs and within spaces between the CNTs. A global maximum lateral width is defined as the greatest lateral width of any of the spaces. A material is directly over the CNTs, with the material being a plurality of particles that have minimum cross-sectional equatorial widths exceeding the global maximum lateral width. Some embodiments include methods in which a plurality of crossed carbon nanotubes are formed over a semiconductor substrate. The CNTs form an undulating upper topography extending across the CNTs and within spaces between the CNTs. A global maximum lateral width is defined as the greatest lateral width of any of the spaces. A material is deposited over the CNTs, with the material being deposited as particles that have minimum cross-sectional equatorial widths exceeding the global maximum lateral width.

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