4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Ervin T. Hill

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Method and apparatus for self-aligned MOS patterning

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for manufacturing high density flash memory and high...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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