4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Erik S. Jeng

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Anti-reflection oxynitride film for polysilicon substrates

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Contact process using taper contact etching and polycide step

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Contact structure using taper contact etching and polycide step

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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DRAM using oxide plug in bitline contacts during fabrication

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Enhanced reflectivity coating (ERC) for narrow aperture width co

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Profile ID: LFUS-PAI-P-170360

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