Automated dynamic metrology sampling system and method for...

Details Automated dynamic metrology sampling system and method for... Automated dynamic metrology sampling system and method for...

2005-05-11

2009-02-03

Barbee, Manuel L (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C702S182000, C700S108000, C700S121000

Reexamination Certificate

active

07487054

ABSTRACT:
A system and method for optimizing and implementing a metrology sampling plan. A system is provided that includes a system for collecting historical metrology data from a metrology tool; and a reduction analysis system that compares an initial capability calculated from the historical metrology data with a recalculated capability for a reduced data set, wherein the reduced data set is obtained by removing a subset of data from the historical metrology data.

REFERENCES:
patent: 6859746 (2005-02-01), Stirton
patent: 6922600 (2005-07-01), Conrad et al.
patent: 6965600 (2005-11-01), George
patent: 6965808 (2005-11-01), Conrad et al.
patent: 2004/0119749 (2004-06-01), Luque
Liu, X. Q. “Analytical analysis of effect of Sampling Plan on Cpk” Proceedings of 1995 IEEE Annual International Engineering Management Conference p. 257-259.

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