300MM single stackable film frame carrier

Details 300MM single stackable film frame carrier 300MM single stackable film frame carrier

2005-01-04

2005-01-04

Foster, Jim (Department: 3728)

Special receptacle or package

For plate or sheet

Fragile or sensitive

C206S509000, C206S821000

Reexamination Certificate

active

06837374

ABSTRACT:
An interlockable film frame carrier has central and peripheral portions for securely storing a film frame, the film frame supporting a film, a semiconductor wafer disposed on the film. The central portion has structure for supporting the semiconductor wafer and for allowing access to a lower surface of the stored film frame. The peripheral portion of the film frame carrier includes structure for supporting a peripheral portion of the film frame and matable stacking members. When the film frame is stored, two film frame carriers are interlocked by mating the stacking members. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 CFR §1.72 (b).

REFERENCES:
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patent: 5418692 (1995-05-01), Nemoto
patent: 6296122 (2001-10-01), Nakazono et al.
patent: 6553733 (2003-04-01), Hock et al.

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