300 mm microenvironment pod with door on side

Details 300 mm microenvironment pod with door on side 300 mm microenvironment pod with door on side

2011-05-31

2011-05-31

Pickett, J. Gregory (Department: 3728)

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

C206S454000

Reissue Patent

active

RE042402

ABSTRACT:
A container for creating a microenvironment is disclosed. The container includes a shell, a door and a plurality of supports having a unique design which are used to securely retain items, such as silicon wafers, in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.

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