Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Inventor
active
Heterogeneous substrate including a sacrificial layer, and a...
Method of fabricating a MEMS/NEMS electromechanical component
Method of fabricating an electromechanical device including...
Piezoelectric actuation structure including an integrated...
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Profile ID: LFUS-PAI-P-2228208