4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Elizabeth Lynn Roherty-Osmun

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Chemical vapor deposition of W-Si-N and W-B-N

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Synthesis of W-Si-N films by chemical vapor deposition using WF.

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent

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Profile ID: LFUS-PAI-P-1021975

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