4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Etching inorganic substrate

Elena Rogojina

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Methods of etching silicon-containing films on silicon...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Selective activation of hydrogen passivated silicon and...

Semiconductor device manufacturing: process – Gettering of substrate – By implanting or irradiating
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