4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Processes of growth from liquid or supercritical state
  6. Having pulling during growth

Eiji Kajita

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Manufacturing method for a silicon single crystal wafer

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Patent

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Silicon single crystal wafer

Stock material or miscellaneous articles – Composite – Of silicon containing
Reissue Patent

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Silicon single crystal wafer and manufacturing method for it

Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-169503

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