4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Edward K. McIntyre, Jr.

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Broad beam flux density control

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Ion beam control system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Ion generating source for use in an ion implanter

Radiant energy – Ion generation – Electron bombardment type
Patent

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Profile ID: LFUS-PAI-P-991705

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