4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With target means

Eberhard Hahn

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Method and apparatus for particle irradiation of a target

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Method of and device for adjusting a shaped-electron-beam workin

Radiant energy – With charged particle beam deflection or focussing – With target means
Patent

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Method of and device for corpuscular projection

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Profile ID: LFUS-PAI-P-368427

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