Method and apparatus for particle irradiation of a target

Details Method and apparatus for particle irradiation of a target Method and apparatus for particle irradiation of a target

1984-05-31

1986-12-30

Fields, Carolyn E.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250398, H01J 37302

Patent

active

046330909

ABSTRACT:
Method and apparatus for particle irradiation of a target, wherein the anisotropic contrast deflection of an irradiation modulator for producing the exposure pattern is produced step by step, the magnitude of the potential difference between the electrodes of a comb electrode is being set, and the structuring of a line probe is controlled by a control logic according to given specifications by utilization of potential setting patterns.

REFERENCES:
patent: 4130761 (1978-12-01), Matsuda
patent: 4153843 (1979-05-01), Pease
patent: 4472636 (1984-09-01), Hahn

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