Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
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active
Anti-reflective coating conformality control
Anti-reflective coatings using vinyl ether crosslinkers
Anti-reflective imaging layer for multiple patterning process
Highly plasma etch-resistant photoresist composition...
Organic polymeric antireflective coatings deposited by...
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