Anti-reflective coatings using vinyl ether crosslinkers

Details Anti-reflective coatings using vinyl ether crosslinkers Anti-reflective coatings using vinyl ether crosslinkers

2006-12-20

2009-10-13

Hamilton, Cynthia (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S326000, C430S330000, C430S325000, C430S271100, C430S272100, C430S276100, C430S275100, C438S952000, C438S761000, C522S149000

Reexamination Certificate

active

07601483

ABSTRACT:
Novel, wet developable anti-reflective coating compositions and methods of using those compositions are provided. The compositions comprise a polymer and/or oligomer having acid functional groups and dissolved in a solvent system along with a crosslinker and a photoacid generator. The preferred acid functional group is a carboxylic acid, while the preferred crosslinker is a vinyl ether crosslinker. In use, the compositions are applied to a substrate and thermally crosslinked. Upon exposure to light, the cured compositions will decrosslink, rendering them soluble in typical photoresist developing solutions (e.g., alkaline developers).

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