4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

DongbuAnam Semiconductor

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Method for fabricating AND-type flash memory cell

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Methods for forming a gate in a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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