4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Dong Qing Li

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HDP-CVD multistep gapfill process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Method for high aspect ratio HDP CVD gapfill

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for high aspect ratio HDP CVD gapfill

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2792817

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