4. Semiconductor device manufacturing: process
  5. Gettering of substrate
  6. By layers which are coated, contacted, or diffused

Donald Y. Chao

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Method of forming a locally strained transistor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Semiconductor device gate structure including a gettering layer

Semiconductor device manufacturing: process – Gettering of substrate – By layers which are coated – contacted – or diffused
Reexamination Certificate

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