4. Brushing, scrubbing, and general cleaning
  5. Machines
  6. Wiping

Donald Edgar Stephens

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Method of cleaning semiconductor wafers and other substrates

Cleaning and liquid contact with solids – Processes – Using solid work treating agents
Patent

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Wafer cleaning apparatus

Brushing – scrubbing – and general cleaning – Machines – Wiping
Patent

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Wafer cleaning apparatus

Brushing – scrubbing – and general cleaning – Machines – Wiping
Reexamination Certificate

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Profile ID: LFUS-PAI-P-637494

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