4. Coating processes
  5. Heat decomposition of applied coating or base material

Doerthe Groteloh

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Method for forming of a silicon oxide layer on a topography

Coating processes – Heat decomposition of applied coating or base material
Patent

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Method of processing a contact pad, method of manufacturing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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