Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
By reaction with substrate
Inventor
active
Method of fabricating silicon devices on sapphire with wafer...
Semiconductor-on-insulator (SOI) structures including...
Semiconductor-on-insulator (SOI) structures including...
Semiconductor-on-insulator(SOI) structures including...
Ultrathin SOI CMOS devices employing differential STI liners
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