4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Dieter P. Griffis

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Chemically enhanced focused ion beam micro-machining of copper

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Chemically enhanced focused ion beam micro-machining of copper

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for water vapor enhanced charged-particle-beam machining

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method for water vapor enhanced charged-particle-beam machining

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Profile ID: LFUS-PAI-P-921709

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