4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Etching inorganic substrate

Diego Feijoo

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Method for reducing and homogenizing the thickness of a...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Method for the wet-chemical treatment of a semiconductor wafer

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
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Process for cleaning a semiconductor wafer using a cleaning...

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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