Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
Having insulated gate
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Damascene-gate process for the fabrication of MOSFET devices...
Disposable-spacer damascene-gate process for SUB 0.05 &mgr;m...
Method of making MOSFET with high dielectric constant gate...
MOSFET with high dielectric constant gate insulator and...
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