4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting

Deana R. Delp

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Endpoint detection using laser interferometry

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Integrated VI probe

Electricity: measuring and testing – Testing potential in specific environment
Reexamination Certificate

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Man-machine interface for monitoring and controlling a process

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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