Man-machine interface for monitoring and controlling a process

Details Man-machine interface for monitoring and controlling a process Man-machine interface for monitoring and controlling a process

2007-01-02

2007-01-02

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S083000, C700S222000, C702S188000, C715S736000

Reexamination Certificate

active

10493470

ABSTRACT:
A process monitoring system (100) for monitoring a plasma processing system. The process monitoring system (100) includes a plurality of processing subsystems (120), and a control system (110) coupled to the processing subsystems (120). The control system (110) is configured to receive monitor data from the processing subsystems (120) and send control data to the processing subsystems (120). The process monitoring system (100) also includes an external interface (140) coupled to the control system (110), where the external interface (140) includes a paging system. The process monitoring system further includes a man-machine interface (MMI) coupled to the control system (110). The MMI is configured to display the monitor data, display the control data, and access the paging system.

REFERENCES:
patent: 5552016 (1996-09-01), Ghanayem
patent: 6122565 (2000-09-01), Wenning et al.
patent: 6147601 (2000-11-01), Sandelman et al.

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