4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

David S. Bang

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Multiple tier collimator system for enhanced step coverage and u

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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PVD sputter system having nonplanar target configuration and met

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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PVD sputter system having nonplanar target configuration and met

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-636361

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