4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

David Ruzic

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Chemically-enhanced physical vapor deposition

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Plasma-based debris mitigation for extreme ultraviolet (EUV)...

Radiant energy – Radiant energy generation and sources – With radiation modifying member
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Profile ID: LFUS-PAI-P-2802607

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