4. Abrading
  5. Abrading process
  6. Glass or stone abrading

David K. Watts

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Chemical mechanical polishing (CMP) slurry for polishing copper

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low selectivity chemical mechanical polishing (CMP) process for

Abrading – Abrading process – Glass or stone abrading
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Method and apparatus for reclaiming a metal from a CMP...

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Treating process fluid by means other than agitation or...
Reexamination Certificate

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Method and apparatus for rejuvenating a CMP chemical solution

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Method for integrating liner formation in back end of line...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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