4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

David J. Nagel

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Pulsed X-ray lithography

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Pulsed X-ray lithography

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Self calibration devices for chemical and bio analytical...

Measuring and testing – Instrument proving or calibrating – Gas or liquid analyzer
Reexamination Certificate

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Profile ID: LFUS-PAI-P-539126

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