Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
Inventor
active
High pressure high non-reactive diluent gas content high...
Oxide etch process with high selectivity to nitride suitable...
Parallel plate electrode plasma reactor having an inductive ante
Parallel-plate electrode plasma reactor having an inductive...
Plasma reactor with heated source of a polymer-hardening precurs
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Profile ID: LFUS-PAI-P-1155038