4. Material or article handling
  5. Apparatus for moving material between zones having different...

David Felsenthal

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In-line sputter deposition system

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Multi-layer sputter deposition apparatus

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Substrate processing pallet and related substrate processing...

Material or article handling – Apparatus for moving material between zones having different...
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Substrate processing pallet and related substrate processing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Substrate processing pallet and related substrate processing...

Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2050922

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