4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

David Dobuzinsky

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Hard mask integrated etch process for patterning of silicon...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
Reexamination Certificate

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High density selective SiO.sub.2 :Si.sub.3 N.sub.4 etching using

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Method of improving etch uniformity in deep silicon etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of reducing erosion of a nitride gate cap layer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Reduced cap layer erosion for borderless contacts

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-552457

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