4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

David Cathey, Jr.

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Atomic layer removal process with higher etch amount

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Shaping method of thin film and manufacturing method of...

Etching a substrate: processes – Forming or treating article containing magnetically...
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Substrate, method of polishing the same, and polishing...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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