4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant

David A Cathey, Jr.

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Method for forming pattern of a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Process for producing a chip using a mold

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Self-emission panel and method of manufacturing the same

Etching a substrate: processes – Forming or treating optical article
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Semiconductor device manufacturing method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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