4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Daty M. Rogers

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Antireflective structure and method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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In-situ plasma ash/treatment after via etch of low-k films...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2715149

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