4. Semiconductor device manufacturing: process
  5. Radiation or energy treatment modifying properties of...
  6. Ionized irradiation

Darin Arthur Chan

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Formation of a barrier layer for tungsten damascene interconnect

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Patent

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NH.sub.3 /N.sub.2 plasma treatment to enhance the adhesion of si

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of... – Ionized irradiation
Patent

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Profile ID: LFUS-PAI-P-884891

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