4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Daniele Pillias

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Process for the treatment of thin films having properties of ele

Coating processes – Direct application of electrical – magnetic – wave – or... – Ion plating or implantation
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Process for treatment of thin films based upon metallic oxide or

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-1671601

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