4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Daniel Shaw Brooks

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Dishing and erosion monitor structure for damascene metal proces

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Patent

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Dishing and erosion monitor structure for damascene metal proces

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
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