4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With detector

Daniel N. Bui

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Apparatus for improved image resolution in electron microscopy

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Stage for charged particle microscopy system

Optical: systems and elements – Compound lens system – Microscope
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1734108

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