4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Daniel L. Flamm

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Multi-temperature processing

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Process depending on plasma discharges sustained by inductive co

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Process optimization in gas phase dry etching

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Patent

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Process optimization in gas phase dry etching

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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