4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Daniel C. Wang

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Use of multiple etching steps to reduce lateral etch undercut

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Use of pedestals to fabricate contact openings

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Profile ID: LFUS-PAI-P-2946728

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