4. Measuring and testing
  5. Volume or rate of flow
  6. Proportional

Daniel Alexander Smith

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External volume insensitive flow verification

Data processing: measuring – calibrating – or testing – Calibration or correction system – Fluid or fluid flow measurement
Reexamination Certificate

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Pulsed mass flow delivery system and method

Semiconductor device manufacturing: process – Including control responsive to sensed condition
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Pulsed mass flow delivery system and method

Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
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Pulsed mass flow delivery system and method

Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
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Thermal mass flow rate sensor having fixed bypass ratio

Measuring and testing – Volume or rate of flow – Proportional
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Profile ID: LFUS-PAI-P-2974421

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